Article ID Journal Published Year Pages File Type
1685973 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 4 Pages PDF
Abstract

The collisional process of glancing angle gas cluster ion impact was studied using molecular dynamics (MD) simulations. Ar2000 clusters accelerated to 20 keV were irradiated onto a Si(1 0 0) target at various incident angles ranging from 0° to 80°. The investigation of the surface profile after collision revealed that there is a certain incident angle where the incident cluster penetrates the target surface to cause crater-like damage. For larger incident angles, such as 80° from the surface normal, the cluster slides on the target surface without creating displacements. This mechanism of non-damage irradiation was examined with respect to the perpendicular component of incident energy.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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