| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1686111 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2006 | 5 Pages |
Abstract
z-Cut stoichiometric lithium niobate crystals are implanted by 3.6Â MeV Si2+ ions at doses of 3-10Â ÃÂ 1013Â ions/cm2 at room temperature. Planar waveguides are formed by the ion irradiation induced extraordinary refractive index enhancement in the near surface regions. The waveguide properties are characterized by prism coupling and finite difference method. The effective refractive indices of the TM modes increase when implantation of higher doses is performed. It is found that the lattice damage could be considerably reduced or even almost removed by suitable annealing treatment.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Lei Wang, Feng Chen, Xue-Lin Wang, Liang-Ling Wang, Ke-Ming Wang, Lei Gao, Hong-Ji Ma, Rui Nie,