Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1686421 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2008 | 6 Pages |
Abstract
The large-area, high-density of ∼1–2 × 109/cm2 silicon nanocone arrays by ion-irradiation with incident angle of 75° have been achieved by using carbon-cone-mask. The scanning electron microscopy (SEM) images show that the width of silicon nanocones is ∼150 nm and the height is ∼400 nm. The investigation of SEM shows that the formation of the silicon nanocones proceeds through three periods, carbon nanocones–nanocones with carbon on the top and silicon at the bottom-silicon nanocones.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Qintao Li, Zhichun Ni, Shumin Yang, Jinlong Gong, Dezhang Zhu, Zhiyuan Zhu,