Article ID Journal Published Year Pages File Type
1686447 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 4 Pages PDF
Abstract
We have bombarded crystalline Si with high-energy (1.847 MeV/atom) atomic C+ and molecular C2+ ions in 〈1 1 1〉, 〈1 0 0〉 and 〈2 1 1〉 axial channeling and in random directions to observe the effect of Coulomb explosion (CE) for the molecular ions. The energy spectra of backscattered ions measured with equivalent fluences of atomic and molecular ions are compared. In channeling spectra measured with C+ and C2+ beams the significant de-channeling due to damage build-up caused by the irradiation was found to be equal for atoms and molecules and linearly increasing with fluence in the studied range. In addition to the damage effect the CE effect was clearly observed for the three channels studied.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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