| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1686473 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2006 | 5 Pages |
Abstract
This work illustrates the advantages of using p-polarized radiation at an incidence angle of 70° in contrast to the conventional unpolarized beam at normal (or near-normal) incidence for the infrared spectroscopic study of polycarbosilane, polysilazane and polysiloxane thin films synthesized by plasma enhanced chemical vapor deposition (PECVD) and subsequently irradiated with 170 keV He+ ions at fluences from 1 × 1014 to 1 × 1016 cm−2. Several bands not seen using the conventional mode could be observed in the polarized mode.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
R.V. Gelamo, B.C. Trasferetti, S.F. Durrant, C.U. Davanzo, F.P. Rouxinol, G.Z. Gadioli, M.A. Bica de Moraes,