| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1686955 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2006 | 8 Pages |
Abstract
A new method to measure depth distributions of elements by micro-X-ray fluorescence analysis was developed. This method is based on the use of a focusing optical element and the knife-edge principle and gives depth resolutions of about 23 μm. Furthermore, this method also allows measuring surface profiles with a depth resolution of 7 μm. In this paper experimental results of depth distribution measurements of a layered sample and of the surface roughness profile of another sample are presented.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
A. Bjeoumikhov, S. Bjeoumikhova, R. Wedell, R. Gubzhokov, Z. Margushev,