Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1687037 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2009 | 4 Pages |
Abstract
The deposition of polyatomic C2H5+ ions is studied using classical molecular dynamics simulations with a new improved Brenner potentials developed by Brenner. The simulation results show that when the incident energy is less than 65 eV, the deposition coefficient of H is larger than that of C atoms. When the incident energy is larger than 65 eV, the deposition of H is less than that of C atoms. With increasing incident energy, a transition from Csp3-rich to Csp2-rich in the grown films is found.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
X.D. Lu, Y. Qin, J. Ning, T. Zhou, C.Y. Deng, Ch. Meng, Q. Qiu, F. Gou, Zhang Chuanwu, Yan Ying, Jiang Ming,