Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1687043 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2009 | 4 Pages |
Abstract
The Langmuir probe measurements were carried out in a planar rf discharge of N2 and Ar gases. The dc characteristic I-U curves are calculated from the measured rf characteristic I-U curves for frequencies 10-60Â MHz. The measured parameters such as electron temperature and electron density are compared with the simulated results. At gas pressures 10-40Â Pa, the sheath thickness at the powered electrode was proportional to fâ0.5 for simulation and fâ2/3 by using the electrical parameters of the probe measurements and to pâ0.5 for both cases.
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Authors
P. Altantsog, Sh. Chadraabal, G. Batdemberel,