Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1687180 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2006 | 4 Pages |
Abstract
We have investigated effects induced by 100 MeV Xe and 90 MeV Ni ion irradiation on polycrystalline (poly-) SiO2 tridymite-films prepared by oxidation of Si(1 0 0) substrates at 1300 °C for 5 h in air. X-ray diffraction (XRD) results reveal alignment of the grain-orientation and increase of the lattice parameters as well as amorphisation due to the electronic energy deposition by ion irradiation. No clear images for grain-growth have been observed by atomic force microscopy (AFM).
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
N.S. Shinde, N. Matsunami, T. Shimura, M. Sataka, S. Okayasu, T. Kato, M. Tazawa,