| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1687218 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2017 | 4 Pages |
Abstract
The rearrangement allowed larger aperture diaphragms for higher beam currents at a moderate increase in beam spot sizes. Performance tests yielded proton microbeam currents and half-widths of 4.5 nA at 1.5 μm, 8.3 nA at 1.5 μm and 17.2 nA at 2 μm. For high resolution work the expected beam spots around 0.3 μm at 100 pA were not achieved. The reason is very likely interference on the beam scanner, correlated in x- and y-direction, which results from the insufficiently rectified power supply voltage of the transconductance amplifier.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Martin Rothermel, Tilman Butz, Tilo Reinert,