Article ID Journal Published Year Pages File Type
1687225 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2009 4 Pages PDF
Abstract

The integrated probe-forming system for the Sumy nuclear microprobe comprises two doublets of magnetic quadrupole lenses of new design. Each doublet has been made from a single piece of soft iron by electro-discharge machining. This paper describes the performance tests of the microprobe including the beam scanning control and data acquisition systems. In the first runs a spot size of about 2 μm (FWHM) was obtained for the high beam current mode (up to 200 pA) by scanning a conventional copper grid with 1000 meshes per inch. Simulated beam optics parameters are compared with the experimental data.

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Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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