| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1687318 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2006 | 5 Pages |
Abstract
We have investigated the formation of nanosized structures on InP(1Â 1Â 1) surfaces after 1.5Â MeV Sb implantation. Scanning probe microscope (SPM) has been utilized to investigate the size, height and the density distributions of the nanostructures as a function of ion fluence. We observe nanostructures smaller than 100Â nm and lower than 4Â nm at all fluences. Moreover in large nanostructures we observe agglomeration of several smaller structures. We have also investigated the rms surface roughness of the InP(1Â 1Â 1) surfaces after MeV implantations.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Dipak Paramanik, Shikha Varma,