| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1687652 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2008 | 5 Pages |
Abstract
There are great interests in electrochromic (EC) technology for smart windows and displays over the last decade. The substrate, a conductive glass being coated indium tin oxide (ITO) thin films, deposited tungsten trioxide (WO3) using radio-frequency (RF) sputtering and implanted Ti by a metal–plasma ion implantation (MPII) in this study. The optical density (when the implanted dose is less than 2 × 1015 ions/cm2) is approximately 1.6 times the unimplanted Ti. At low implanted dose +6 valence tungsten ions improve optical density. At high implanted dose, low-valence tungsten ions reduce the optical density.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Ko-Wei Weng, Sheng Han, Ya-Chi Chen, Han-Chun Chuang,