| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1687722 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2007 | 6 Pages |
Abstract
A helicon and a multicusp version of radio-frequency ion sources with compact permanent magnet systems have developed and tested to show the following performance data: plasma density of 1011–9×1012 cm−3, pressure of 2–10 mTorr, beam current densities of 10–130 mA/cm2 , brightness ∼100 A/(m2 rad2 eV), energy spread 8–30 eV and an RF power input into the plasma of 40–400 W. Possibilities for a further increase in the differential brightness of the RF ion sources are discussed.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
V. Miroshnichenko, S. Mordyk, D. Shulha, V. Storizhko, V. Voznyy,