| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1687792 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2007 | 5 Pages |
Abstract
The other construction utilized the goniometer facility mounted on the microbeam chamber. We implanted the samples at 43° tilt, and developed the samples not as deep as the ion range. This way both the sidewalls and the membranes are attached to the bottom of the sample.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Cs. DücsoË, I. Rajta, P. Fürjes, E. Baradács,