Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1687900 | Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms | 2007 | 4 Pages |
Abstract
We have used a high collimated neutral chromium atomic beam to write periodic nanometer-scale structures by depositing an atomic beam of 52Cr through an off-resonant laser standing wave with the wavelength of 425.55 nm onto a silicon substrate. The resulting nanolines exhibit a period of 215 ± 3 nm with a height of 1 nm, which was half the wavelength of standing wave used to write the grating.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Zhang Wen-tao, Li Tong-bao, Zhang Bao-wu,