Article ID Journal Published Year Pages File Type
1687900 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2007 4 Pages PDF
Abstract

We have used a high collimated neutral chromium atomic beam to write periodic nanometer-scale structures by depositing an atomic beam of 52Cr through an off-resonant laser standing wave with the wavelength of 425.55 nm onto a silicon substrate. The resulting nanolines exhibit a period of 215 ± 3 nm with a height of 1 nm, which was half the wavelength of standing wave used to write the grating.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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