Article ID Journal Published Year Pages File Type
1688023 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 6 Pages PDF
Abstract

Damage in n-GaAs implanted with 100 MeV 28Si ions has been investigated using low temperature (T ∼ 20 K) photoluminescence (PL) measurements on samples irradiated with fluences of 1016 ions m−2, 1017 ions m−2 and 1018 ions m−2, respectively and annealed at various temperatures up to 1000 °C. A dominant annealing stage is seen at 650 °C where the PL begins to recover. PL spectra reveal several features which vary with annealing temperature, fluence and depth. Assignments of the defect structures responsible for the emission peaks are suggested.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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