Article ID Journal Published Year Pages File Type
1688024 Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 2006 10 Pages PDF
Abstract

In this paper, grazing scattering of 3 keV Ar along the [1 0 0] direction of an ideal (unreconstructed) Si(1 0 0) surface is simulated using the molecular dynamics (MD) method. A detailed analysis of the scattering trajectories is performed. The scattering process in many cases involves a sequence of simultaneous collisions between projectile and target atoms. The scattered intensity is presented as a function of the polar scattering angle, the azimuthal scattering angle and the energy loss. Various prominent features of the spectra are assigned to specific scattering trajectories.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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