Article ID Journal Published Year Pages File Type
1688313 Vacuum 2015 4 Pages PDF
Abstract

•InN epilayers were prepared on c-plane (0001) sapphire substrates by plasma-assisted MBE.•The nitridation of the substrate impacted the qualities of InN flims.•The energy band-gap of InN layers were found to be around 0.75–0.80 eV.

InN epilayers were prepared on c-plane (0001) sapphire substrates by plasma-assisted molecular beam epitaxy (PAMBE). We studied the effect of nitridation on structure, surface morphology, electrical and optical properties of InN films using X-ray diffraction (XRD), Reflection high-energy electron diffraction (RHEED), scanning electron microscopy (SEM), atomic force microscopy (AFM), Hall and photoluminescence (PL) measurement. The results showed a significant improvement of the crystalline qualities and surface morphologies and enhancement of the electrical and optical properties for InN films grown after nitridation. Moreover, the energy band-gap of InN films were also determined by optical absorption and photoluminescence (PL) measurement.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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