| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1688347 | Vacuum | 2014 | 4 Pages |
Abstract
Transformation from h-BN (boron nitride) to fullerene-like e-BN with increasing N2 ratios (fN2, 20-33%) has been found in a radio frequency magnetron sputtering deposition by using Fourier transform infrared spectroscopy (FTIR). X-ray photoelectron spectroscopy (XPS) examination suggests that the stoichiometric e-BN molecule contains equal numbers of sp3 and sp2 bonds at fN2=33%. The surface morphology and corresponding roughness of as-deposited BN films were evaluated by Atomic force microscopy (AFM).
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Chuanbin Wang, Xiaoshuang Luo, Song Zhang, Qiang Shen, Lianmeng Zhang,