Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1688406 | Vacuum | 2014 | 4 Pages |
Abstract
Vacuum gauges that control fast processes in industrial applications, e.g. load locks, should immediately react to pressure changes. To study the response time of vacuum gauges to rapid pressure changes, a dynamic vacuum standard was developed where the pressure may change from 100Â kPa to 100Â Pa within 20Â ms in a step-wise manner or within longer times up to 1Â s in a predictable manner. This is accomplished by a very fast opening gate valve DN40 and exchangeable orifices and ducts through which the mass flow rate can be calculated by gas flow simulation software. A simple physical model can be used to approximate the calculations. Experiments have been performed with capacitance diaphragm gauges with improved electronics to give a read-out every 0.7Â ms. Preliminary results indicate that their response time is at most 1.7Â ms, but may be significantly less.
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Authors
Karl Jousten, Sarantis Pantazis, Joachim Buthig, Regine Model, Martin Wüest, Jaroslaw Iwicki,