Characterization of nanoparticle flow produced by gas aggregation source

A simple and compact gas aggregation cluster and nanoparticle source based on a planar magnetron (Haberland type) without mass separation was characterized. Such source produces a beam of neutral, positively and negatively charged particles that are dragged by a buffer gas expanding from the aggregation chamber. Sizes, speeds and charges of nanoparticles have been determined using a combination of TEM micrographs, electrostatic deflection setup and numeric modeling. The strong dependence of the velocity of the nanoparticles on their size was confirmed both experimentally and by modeling.

► The flow of nanoparticles from the gas aggregation cluster source was studied. ► A numerical model of the flow of nanoparticles was developed. ► Experimentally obtained velocities of the nanoparticles were from 30 m/s to >200 m/s. ► The results confirm zero or single positive/negative charge of the nanoparticles.