Article ID Journal Published Year Pages File Type
1688687 Vacuum 2012 6 Pages PDF
Abstract

Measurements of surface loss probabilities of oxygen atoms on Simax glass, PET, Teflon, and Mica at room temperature are presented. The surface loss probability was measured by using a stationary afterglow double pulse discharge technique. The main discharge pulse created oxygen atoms by dissociation of O2 molecules. The second (probe) discharge pulse excited existing atoms in the afterglow. The decay of the density of the oxygen atoms in volume was monitored by discharge induced emission spectroscopy of O lines and Ar actinometric lines. The rate of decay of oxygen atoms was used to determine their surface loss probability. The determined surface loss probabilities are: Simax (3.9 ± 0.65) × 10−3, PET (9.3 ± 1.3) × 10−4, Teflon (6.6 ± 1.3) × 10−4, and Mica (1.2 ± 0.3) × 10−3.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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