| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1688709 | Vacuum | 2012 | 4 Pages |
Abstract
⺠Non-standard sputtering geometry (oblique sputtering) of the Zno films was used. ⺠Gallium atoms were used as doping elements for ZnO conductivity improving. ⺠Conductivity of obliquely sputtered films increased about one order of magnitude. ⺠Applying 200°C substrate temperature the optical properties of the films improved.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
M. Netrvalova, I. Novotny, L. Prusakova, V. Tvarozek, P. Sutta,