| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1688723 | Vacuum | 2012 | 4 Pages |
Abstract
⺠Alteration of SiC surface composition induced by low energy ion bombardment of Ar. ⺠Auger electron spectroscopy study based on low and high energy Auger peaks. ⺠Trial and error method to simulate the peak intensity changes. ⺠Carbon enrichment at surface that is more expressed at high incident angle bombardment.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
A. Sulyok, M. Menyhárd, J.B. Malherbe,