| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1688773 | Vacuum | 2011 | 6 Pages |
Abstract
⺠Porous electrode with gas inlet at the bottom of chamber can improve SiH3 distribution. ⺠SiH3 mole fraction increases as electrode separation decreases and 10 mm is the optimal distance. ⺠2.5 mm of the hole diameter on porous electrode is the best. ⺠The gas flow rate of 0.5 m/s is selected as the optimal process conditions.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Jianning Ding, Yazhi Zhao, Ningyi Yuan, Mingming Chen, Shubo Wang, Feng Ye, Biao Kan,