| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1688797 | Vacuum | 2013 | 5 Pages |
Abstract
⺠Plasma interaction with uneven surface was studied by computational simulation. ⺠Dependence of fluxes and energies of ions on the geometry is discussed. ⺠The role of sheath formation on results is emphasized.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Vojtech Hruby, Rudolf Hrach,