The influence of temperature and nitrogen pressure on S-phase coatings deposition by reactive magnetron sputtering

The paper presents the results of investigations on S-phase coatings obtained at various temperatures from the range 25–400° and for different nitrogen content in plasma. The influence of both parameters on layer formation is investigated. A special attention is paid to phase composition of the coating. The phase composition was evaluated using X-ray diffraction (XRD and GXRD). EMPA (EDS and EDS) and GDOS techniques were used to study element composition of the layers. It was observed that nitrogen content in plasma has an important effect on nitrogen concentration in the coatings and on the deposition rate, while temperature influence is negligible. During the deposition at high temperature and in the presence of high nitrogen content nitrogen diffusion into the austenitic substrate takes place and a formation of S-phase layer is observed.

► We examined the influence of temperature and nitrogen partial pressure influence on S-phase layer formation. ► Substrate temperature has a minor effect on nitrogen content in the coatings and their deposition rate. ► An increase of nitrogen content in plasma increases a nitrogen content in the coatings. ► An increase of nitrogen content in plasma decreases a deposition rate. ► An increase of temperature and nitrogen contents leads to nitrogen diffusion into the stainless substrate.