Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1688819 | Vacuum | 2011 | 7 Pages |
The modification of inner surfaces of tubes becomes increasingly important in many fluid transport applications. However, long tubes require special plasma techniques for a surface functionalization on the nanometer scale without damaging the bulk. This work focuses on pulsed DC glow discharges in inert argon, reactive oxygen, nitrogen and air plasma as well as polymerizing acetylene plasma revealing strong influences to the wetting behavior by the total duration of the plasma discharge time (plasma on-time). While the investigated polymers polyamide, polycarbonate, polyethylene terephtalate, and thermoplastic polyurethane react very differently on the inert and reactive etching (activation) plasma, the deposition of plasma polymer films (polymer-like carbon with decreasing cross-linking at lower plasma intensity and >50% hydrogen content) suppresses all substrate influences.
► Development of PACVD/plasma polymerization based process for coating of inner faces of tubes with pulsed DC plasma. ► Linear dependency of film roughness on the plasma on-time growth rate. ► Growth rate in plasma on-time is rather independent on pulse frequency.