Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1688857 | Vacuum | 2011 | 5 Pages |
Abstract
This paper gives an overview of the main chemical processes which take place in cold plasmas generated in glow discharges, both in the gas phase and at the surfaces in contact with the plasma. Illustrative examples are provided where the relevance of different processes is evinced. Most common plasma characterization techniques and their recent improvements are also presented briefly.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Isabel Tanarro, Víctor J. Herrero, Esther Carrasco, Miguel Jiménez-Redondo,