Article ID Journal Published Year Pages File Type
1688857 Vacuum 2011 5 Pages PDF
Abstract

This paper gives an overview of the main chemical processes which take place in cold plasmas generated in glow discharges, both in the gas phase and at the surfaces in contact with the plasma. Illustrative examples are provided where the relevance of different processes is evinced. Most common plasma characterization techniques and their recent improvements are also presented briefly.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
, , , ,