Article ID Journal Published Year Pages File Type
1688888 Vacuum 2013 4 Pages PDF
Abstract
► Mo-Al-Si-N coatings were synthesized using dc magnetron sputtering. ► Mo-Al-Si-N coatings were consisted of nanocrystalline Mo-Al-N and amorphous Si3N4. ► The hardness reaches a maximum of 36 GPa at the silicon content of 8.3 at.%. ► Mo-Al-Si-N coatings are in compressive stress state, with maximum value of 1.8 GPa.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Effect of Si content on the microstructure and mechanical properties of Mo-Al-Si-N coatings
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