Article ID Journal Published Year Pages File Type
1688919 Vacuum 2012 6 Pages PDF
Abstract
► DC reactive sputtered ZnO:Al thin films have been prepared using a Zn:Al metallic target and plasma emission monitoring (PEM) control system. ► The relationship between the optical, electrical and structural properties of ZnO:Al thin films is discussed. ► A modified formula for the figure of merit is introduced and used in determining the optimum TCO conditions for the ZnO:Al films.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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