Article ID Journal Published Year Pages File Type
1688960 Vacuum 2010 5 Pages PDF
Abstract
Analysis of ion sources based on a time-of-flight signal function is applied to quantify their emission characteristics as the hidden partial currents of the ionized species constituting, the total measured current, the centre-of-mass velocity of individual charge states, their abundance and the ion temperature.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
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