Article ID Journal Published Year Pages File Type
1689016 Vacuum 2010 4 Pages PDF
Abstract
ZnO thin films were prepared on glass or on homo-buffer/glass by a RF magnetron sputtering method at RF power of 100-550 W. The structural and Raman characteristics of the films were analyzed by X-ray diffraction and Raman scattering. There appeared a sharp peak of 1080.2 cm−1 near the A1(2LO) mode (1156 cm−1) of ZnO in the Raman spectra when the RF power was higher than 300 W. In this case, the (100) peak of ZnO film appeared obviously. It was speculated that the Raman mode at 1080.2 cm−1 was induced by the ordered distribution of Zni defects in ZnO lattice.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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