Article ID Journal Published Year Pages File Type
1689320 Vacuum 2007 5 Pages PDF
Abstract

Mg–Ni films were grown on a silicon substrate using two magnetron sputter deposition sources and simultaneous Ar ion irradiation. X-ray diffraction microstructure and phase composition, EDX elemental composition and atomic force microscopy surface topography analysis showed that under low-energy Ar ion irradiation (bias voltages from 0 to −120 V), the Mg2Ni phase was dominant and on the contrary with the increase of ion energy (bias voltages from −120 to −200 V), the MgNi2 phase appeared. The Mg content changed from 63 at% down to 42 at% in films grown under bias voltages of 0 and −200 V, respectively. During hydrogenation at 8 bar, 270 °C for 3 h, films with a dominant phase of Mg2Ni were transformed into Mg2NiH4. Hydrogen in MgNi2 films was mainly in interstitials and tended to form bubbles.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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