Article ID Journal Published Year Pages File Type
1689353 Vacuum 2007 5 Pages PDF
Abstract

Gas phase ion–molecule reactions of positive He+ ions produced from helium with neutral carbon tetrafluoride have been studied. The measurements were made with a quadrupole mass spectrometer with a high-pressure ion source. The fractional abundance Ii/∑Ii of dominant ions CF3+, CF2+ and helium ions has been determined as a function of the (1% CF4 and 99% He) gas mixture pressure (in the range 1.33–31.92 Pa) and of the repeller electrode potential (ranging from 3 to 10 V).

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
,