| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1689620 | Vacuum | 2007 | 5 Pages |
Abstract
We describe a program that calculates time dependent pressure profiles in conductance limited vacuum systems where the pump speed and out-gassing can vary as a function of time. In this way pump down or pressure bumps due to temporary leaks or out-gassing can be visualized and analyzed.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
V. Ziemann,