Composite SiOx/hydrocarbonSiOx/hydrocarbon plasma polymer films prepared by RF magnetron sputtering of SiO2 and polyimide

Preparation procedure and properties of composite SiOx/hydrocarbonSiOx/hydrocarbon plasma polymer films are described and discussed. The composite films have been prepared by RF sputtering in argon from two balanced magnetrons equipped with silica (SiO2) and polyimide (PI) targets. The films obtained reveal a wide range of properties which depend on the preparation conditions; primarily on the RF power delivered to the magnetrons. Morphology and composition of the composite films have been analysed by means of AFM, TEM, RBS/ERDA and FTIR. Wettability in terms of contact angle of water increases from 28∘28∘ to 46∘46∘ when the content of the SiOxSiOx component of the composite increases. Peculiar properties of the composite SiOx/hydrocarbonSiOx/hydrocarbon plasma polymer films are discussed with respect to their elemental composition and nature of chemical bonds created on the surface of the films. Finally, an attempt is made to express the amount of inorganic phase present in the organic matrix in terms of a filling factor.