| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1689849 | Vacuum | 2009 | 5 Pages |
Abstract
The growth of epitaxial MgO/TiN multilayer films on (001) Cu has been investigated. In particular, epitaxial structures were grown on (001) Cu layers that were epitaxial on (001) SrTiO3. X-ray diffraction and reflection high-energy electron diffraction indicate that the multilayer structures are epitaxial on the (001) Cu surface. The motivation is the use of crystalline MgO/TiN multilayers as a diffusion barrier to both copper and oxygen. MgO/TiN multilayers are potentially useful as diffusion barriers for Cu interconnects on semiconductors as well as for superconducting wires based on the epitaxial growth of cuprate superconductors on biaxially textured copper.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
K.H. Kim, D.P. Norton, D.K. Christen, C. Cantoni, M. Paranthaman, T. Aytug,