Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1689923 | Vacuum | 2015 | 5 Pages |
Abstract
In this report, the mass and energy spectra of ions in Ar/N2 electron cyclotron resonance (ECR) plasma at the microwave power of 100Â W and the gas pressure of 1Â Pa are investigated by a Hiden EQP analyzer, and also the plasma optical emission spectra are recorded by optical emission spectroscopy (OES). Singly charged Ar+ and N2+ as the dominant ions are detected. The ion energy distribution functions (IEDFs) of Ar+ and N2+ exhibit complicated evolutions of peak structures with varying the N2 fractions. The IEDF of Ar+ is bimodal at the low N2 fractions, and changes to trimodal structure as the N2 fractions are near 40%. However, it turns to be unimodal at the N2 fractions above 80%. The IEDFs of N2+ present unimodal structures in the case of both high and low N2 fractions, and the bimodal profiles appear as the N2 fractions are around 50%. It is suggested that the distributed ionization and the charge-exchange reactions between ions and neutrals are responsible for the evolutions of peak structures for IEDFs.
Keywords
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Authors
Y.C. Zhang, X.H. Xie, H. Li, K. Yang, Z.L. Tang, X.D. Zhu,