| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1689946 | Vacuum | 2008 | 5 Pages |
Abstract
Plasma excitation by Electron Cyclotron Wave Resonance ECWR which makes use of a special branch of the dispersion relations of electromagnetic waves in a weakly anisotropic medium is explained on the basis of tensorial electrodynamics. The technical performance of the production of electrodeless low pressure plasmas by ECWR is described, and applications of such plasmas for postionization purposes in surface mass spectrometry SNMS, broad beam ion sources and plasma reactors for PECVD are briefly discussed.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Hans Oechsner,