Article ID Journal Published Year Pages File Type
1689979 Vacuum 2006 4 Pages PDF
Abstract

The effective pumping speed for particular gas species has to be known in a vacuum system for measuring the absolute amount of this gas. The effective pumping speed for hydrogen during measurements of permeation can be readily determined, usually with sufficient accuracy, if the apparatus is equipped with a device enabling sudden reduction of pumping speed. This process is described.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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