Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1689979 | Vacuum | 2006 | 4 Pages |
Abstract
The effective pumping speed for particular gas species has to be known in a vacuum system for measuring the absolute amount of this gas. The effective pumping speed for hydrogen during measurements of permeation can be readily determined, usually with sufficient accuracy, if the apparatus is equipped with a device enabling sudden reduction of pumping speed. This process is described.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
L. Peksa, T. Gronych,