| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1690043 | Vacuum | 2014 | 7 Pages |
•DLC films deposited on microrouter under a mixture of acetylene/argon plasma in ECR system.•Router bit performance was evaluated by surface roughness of trench sidewall and precision width tolerance.•Routing efficiency is relevant to the substrate bias voltage.•It is verified for improving the tooled-life by optimizing DLC coated microrouter in PCB machining.
The efficiency of cutting tools was increased by deposition diamond-like carbon (DLC) films on microrouter bits to improve the chip flow and reduce cutting force. DLC films deposited under a mixture of acetylene/argon plasma in a large area and three dimensional deposition electron cyclotron resonance (ECR) system. Router bit performance in dry routing of FR-4 type printed circuit board was evaluated by inspecting the surface roughness of trench sidewalls and the routing precision width tolerance. By optimizing deposition conditions, the DLC lubricant-coated microrouter bits achieve a better enhancement in performance. Surface analysis with scanning electron microscopy reveals that DLC coated microrouters exhibit lower friction and enhance the anti-adhering properties of the microrouter, resulting in significant improvements in routing quality. The microstructure and chemical configuration are investigated by Raman spectroscopy and X-ray photoelectron spectroscopy, respectively. The routing efficiency shows a high dependence on the microstructure of DLC coating, which varies with deposition conditions, in particular with substrate bias voltage.
