Article ID Journal Published Year Pages File Type
1690097 Vacuum 2006 5 Pages PDF
Abstract
Superlattice nitride coatings with four different layer constituents, i.e., ZrN, MoN, NbN and AlN, were synthesized using an unbalanced closed-field magnetron sputtering coater. At small superlattice modulation periods, both MoN and AlN layers adapted to the cubic B1 structure due to a template effect, and the coatings exhibited a strong (2 0 0) preferred orientation. Increasing the modulation period above a critical value led to the formation of hexagonal MoN and AlN layers with diminishing (2 0 0) preferred orientation. These microstructure changes were reflected in the coating mechanical properties. Relatively high hardness and Young's modulus values were obtained at small modulation periods, which decreased dramatically above the critical modulation period. The effects of substrate bias on the layer crystallographic structure, coating preferred orientation and mechanical properties were similar to those of the modulation period.
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
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