Article ID Journal Published Year Pages File Type
1690152 Vacuum 2008 4 Pages PDF
Abstract

The ion density distribution of plasma sheath in an oblique magnetic field is investigated with a fluid model. We performed numerical simulations of the sheath. The results reveal that the magnetic field has significant effects on the plasma sheath, including ion density distribution and space charge density distribution. Two cases of ion incidence are considered here. Under suitable conditions, Lorentz force induces fluctuations in the ion density. And the magnetic field parallel to the board is responsible for these changes. The action states of ions are more complicated while the ions enter the sheath with an oblique incidence angle. Ions could gather in some regions, so that it leads to small peaks of the density curve. Also the space charge density in such regions is slightly higher.

Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Authors
, , , , , ,