Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1690189 | Vacuum | 2015 | 7 Pages |
Abstract
The effect of the buffer layer in ZnO:Al sensing film and in ZnO:Al biological sensor with nanometer grain is explored herein. The performance of buffer layer in a ZnO:Al sensor is remarkable. The sensitivity of the ZnO:Al RH sensor with a buffer layer is about 1.1. The rise time of the adsorption reaction from 30% RH to 90% RH for the ZnO:Al RH sensor with buffer layer is about 105Â s. Also, the drop time of the desorption reaction from 90% RH to 30% RH is about 19Â s. In this research, the sensing performance of the ZnO:Al RH sensor with the selected buffer layer is better than that without the selected buffer layer for the sensing response.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Chih Chin Yang, Jiun Ying Shen,