Article ID Journal Published Year Pages File Type
1690207 Vacuum 2013 6 Pages PDF
Abstract
► We examine array of two dimensional apertures of different sizes above evaporation source optimized the distance between evaporation source and substrate. ► We demonstrate uniform deposition of organic thin film using compact equipment and larger material utilization yield. ► We achieve uniformity of film for simulation and experimental results. ► Optimum distance between evaporation source and substrate is very close.
Keywords
Related Topics
Physical Sciences and Engineering Materials Science Surfaces, Coatings and Films
Preview
Evaluation of uniformity for organic film evaporation using two dimensional different apertures
Authors
, , ,