Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1690219 | Vacuum | 2013 | 5 Pages |
Abstract
⺠Obtained Ti-Si-C films were composite materials consisting of Ti3SiC2 MAX-phase, TiCx phase and graphite phase. ⺠Physical and mechanical properties of the film depended on each amount of these phase. ⺠Each amount of these 3 phases depended on the carbon content in the film. ⺠The film properties could be controlled by the carbon content supplied using sputter-deposition.
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Tsutomu Sonoda, Setsuo Nakao, Masami Ikeyama,