| Article ID | Journal | Published Year | Pages | File Type |
|---|---|---|---|---|
| 1690267 | Vacuum | 2006 | 5 Pages |
Abstract
A sheath model in an oblique magnetic field is build, which has one-dimension coordinate space and three-dimension speed space. The effects of magnetic field on the structure of RF sheath and parameter characteristics are discussed. The numerical simulation result shows that magnetic field has great effects on the sheath structure, especially in the region near the edge of sheath. Also, the magnetic field affects ion energy in the direction vertically to the board and incidence departure angle.
Keywords
Related Topics
Physical Sciences and Engineering
Materials Science
Surfaces, Coatings and Films
Authors
Jin-Yuan Liu, Fei Zhao, Xiu Zou, Yu Zhang, Yue Liu, Xiao-Gang Wang,