Article ID | Journal | Published Year | Pages | File Type |
---|---|---|---|---|
1690370 | Vacuum | 2013 | 5 Pages |
The multiwalled carbon nanotubes (MWCNTs) were prepared on SiO2 substrates using chemical vapor deposition (CVD). N ion beam bombardment to MWCNTs was performed at different beam currents of 5–15 mA in an ion-beam-assisted deposition (IBAD) system. Scanning electron microscope (SEM) and Transmission electron microscope (TEM) proved no significant crack and surface morphological change for MWCNTs after N ion beam bombardment. X-ray photoelectron spectroscopy (XPS), Fourier transform infrared spectrometry (FTIR), and Raman studies indicated that higher N ion beam current (15 mA) or N atomic concentration (8.6%) induced formation of polar N-containing functional groups of N–C and N–H bonds on the surfaces of MWCNTs. The content of N–C and N–H bonds increased with N ion beam current.